MEMS Foundry service
MEMS foundry service
EPG MEMS FOUNDRY BUSINESS
서비스 개요
- 사업내용
- MEMS 단위&일괄공정, R&D서비스, 제조, 분석서비스
- 추진체계
- 대학 및 MEMS 관련 Fab center 들과 연계한 MEMS Business
-
MEMS Process Design (공정설계)
- MEMS Process Review & Design
- Photomask Design & Fabrication - MEMS Process Consulting
-
MEMS Unit Process Services (단위공정)
- Patterning
- Deposition
- Thermal process
- Etching
- Electroplating
-
MEMS Intergrated Process Sevices (일괄공정)
- MEMS Structure Fabrication
- Wafer-Level Packaging (WLP)
- TSV Processing
- Bumping & RDL
- Needle & Tip Fabrication
(Ni-Co - Electroplating) - COG (Chip-on-Glass)
