MEMS Foundry service

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MEMS Foundry service

MEMS foundry service

EPG MEMS FOUNDRY BUSINESS

Service Overview

Business
MEMS unit & integrated processes, R&D services, manufacturing, and analysis services
Operation
MEMS business in partnership with universities and MEMS-related fab centers
  • MEMS Process Design
    • MEMS Process Review & Design
    • Photomask Design & Fabrication
    • MEMS Process Consulting
    MEMS Process Design icon
  • MEMS Unit Process Services
    • Patterning
    • Deposition
    • Thermal process
    • Etching
    • Electroplating
    MEMS Unit Process icon
  • MEMS Integrated Process Services
    • MEMS Structure Fabrication
    • Wafer-Level Packaging (WLP)
    • TSV Processing
    • Bumping & RDL
    • Needle & Tip Fabrication
      (Ni-Co Electroplating)
    • COG (Chip-on-Glass)
    MEMS Integrated Process icon